Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells

Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells

The fabrication of ordered arrays of nanoporous Si nanopillars with and without nanoporous base and ordered arrays of Si nanopillars with nanoporous shells are presented. The fabrication route is using a combination of substrate conformal imprint lithography and metal-assisted chemical etching. The metal-assisted chemical etching is performed in solutions with different [HF]/[H2O2 + HF] ratios....

Silicon Solar Cells with Nanoporous Silicon Layer

Ordered arrays of nanoporous gold nanoparticles

A combination of a "top-down" approach (substrate-conformal imprint lithography) and two "bottom-up" approaches (dewetting and dealloying) enables fabrication of perfectly ordered 2-dimensional arrays of nanoporous gold nanoparticles. The dewetting of Au/Ag bilayers on the periodically prepatterned substrates leads to the interdiffusion of Au and Ag and the formation of an array of Au-Ag alloy ...

Fabrication and Characterization of Nanoporous Energetic Silicon

Arising as a new class of energetic material, nanoporous energetic silicon holds great potential for applications such as fuzing and thrust generation, which require large power output. In this paper we address fabrication and material characterization as well as monolithic integration of a hotwire initiator and packaging; the first steps toward a fully integrated MEMS/IC/energetic material sys...

Single-electron charging phenomena in silicon nanopillars with and without silicon nitride tunnel barriers

Electron transport in silicon nanopillars has been studied for pillars with zero, one, or two silicon nitride barrier layers of 2 nm thickness. Evidence of Coulomb blockade is presented and the role of the silicon nitride layers is discussed. Wide zero current regions are observed for some devices with two silicon nitride tunnel barriers and these are attributed to the formation of fully deplet...